一种避免涡流产生而减少感性元件品质因数退化的冗余金属填充方法
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TN402

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国家重点研发计划(2018YFB1802002)


A dummy metal filling method to avoid the generation of eddy currents and the quality factor degeneration of inductive elements
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    摘要:

    在芯片实际生产过程中,工艺要求各金属层填充冗余金属以保证表面化学机械抛光后的平坦度从而获得更高的良率.但冗余金属也会引入电路设计中想要避免的寄生电容,此外由于冗余金属对电磁场的干扰,冗余金属的填充会导致电感的品质因数降低.本文提出了一种放射条带状冗余金属的填充方法,在电感周围放置垂直于电感感应电流方向的辐射状金属条,在满足工艺生产需求的前提下,有效抑制了冗余金属对电感品质因数的损耗,相较于一般均匀填充冗余金属的方式,能获得更高品质因数的电感.仿真结果表明,该方法可以应用于工作在15~70 GHz的电感,相较块状阵列填充冗余金属的方法,本方法耦合电感次级线圈和初级线圈的品质因素分别提高7.2%和17.6%.

    Abstract:

    In silicon chip fabrication, each of the metal layers is required to have evenly distributed metal density for chemical mechanical polishing to ensure high yield.Filling dummy metal is a widely-employed solution to such requirement, however, the dummy metal will not only introduce significant parasitic capacitance but also induce eddy current due to electromagnetic coupling with the circuit components.Consequently, the inductive components such as inductors and transformers typically suffer from quality factor degradation after the dummy metals are filled.In this paper, a new approach for filling dummy metals is proposed.The dummy metals around the inductor are filled by metal stripes perpendicular to the current flowing direction, which can reduce the loss due to eddy current and thus alleviate the quality factor degradation.Simulation results show that the proposed method can improve the quality factor by 7.2% for the secondary coil and 17.6% for the primary coil of inductors working at 15 GHz to 70 GHz.

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康泽辉,杨猛,吴亮,薛泉.一种避免涡流产生而减少感性元件品质因数退化的冗余金属填充方法[J].南京信息工程大学学报(自然科学版),2021,13(4):455-460
KANG Zehui, YANG Meng, WU Liang, XUE Quan. A dummy metal filling method to avoid the generation of eddy currents and the quality factor degeneration of inductive elements[J]. Journal of Nanjing University of Information Science & Technology, 2021,13(4):455-460

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  • 收稿日期:2020-12-24
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  • 在线发布日期: 2021-10-11
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